Lithographic apparatus and device manufacturing method

ABSTRACT

A method including mixing using a mixer a first component and a second component to form a liquid before supply to a space between the projection system and a substrate, measuring a property of the liquid using a measuring device and making the feedback available to a controller, based on the feedback, controlling with the controller a physical property of the liquid by controlling the amount of the first and/or second component used to form the liquid, supplying the liquid to the space between the projection system and the substrate, and projecting a patterned beam of radiation, using the projection system, through the liquid onto a target portion of the substrate.

This application is a continuation of U.S. patent application Ser. No.10/957,751, filed Oct. 5, 2004, now being U.S. Pat. No. 7,894,040, whichis incorporated herein its entirety by reference.

FIELD

The present invention relates to a lithographic apparatus and a devicemanufacturing method.

BACKGROUND

A lithographic apparatus is a machine that applies a desired patternonto a target portion of a substrate. Lithographic apparatus can beused, for example, in the manufacture of integrated circuits (ICs). Inthat circumstance, a patterning device, such as a mask, may be used togenerate a circuit pattern corresponding to an individual layer of theIC, and this pattern can be imaged onto a target portion (e.g.comprising part of, one or several dies) on a substrate (e.g. a siliconwafer) that has a layer of radiation-sensitive material (resist). Ingeneral, a single substrate will contain a network of adjacent targetportions that are successively exposed. Known lithographic apparatusinclude so-called steppers, in which each target portion is irradiatedby exposing an entire pattern onto the target portion in one go, andso-called scanners, in which each target portion is irradiated byscanning the pattern through the projection beam in a given direction(the “scanning”-direction) while synchronously scanning the substrateparallel or anti-parallel to this direction.

It has been proposed to immerse the substrate in the lithographicprojection apparatus in a liquid having, a relatively high refractiveindex, e.g. water, so as to fill a space between the final element ofthe projection system and the substrate. The point of this is to enableimaging of smaller features since the exposure radiation will have ashorter wavelength in the liquid. (The effect of the liquid may also beregarded as increasing the effective NA of the system and alsoincreasing the depth of focus.) Other immersion liquids have beenproposed, including water with solid particles (e.g. quartz) suspendedtherein.

However, submersing the substrate or substrate and substrate table in abath of liquid (see, for example, U.S. Pat. No. 4,509,852, herebyincorporated in its entirety by reference) means that there is a largebody of liquid that must be accelerated during a scanning exposure. Thisrequires additional or more powerful motors and turbulence in the liquidmay lead to undesirable and unpredictable effects.

One of the solutions proposed is for a liquid supply system to provideliquid on only a localized area of the substrate and in between thefinal element of the projection system and the substrate (the substrategenerally has a larger surface area than the final element of theprojection system). One way which has been proposed to arrange for thisis disclosed in PCT patent application WO 99/49504, hereby incorporatedin its entirety by reference. As illustrated in FIGS. 2 and 3, liquid issupplied by at least one inlet IN onto the substrate, preferably alongthe direction of movement of the substrate relative to the finalelement, and is removed by at least one outlet OUT after having passedunder the projection system. That is, as the substrate is scannedbeneath the element in a −X direction, liquid is supplied at the +X sideof the element and taken up at the −X side. FIG. 2 shows the arrangementschematically in which liquid is supplied via inlet IN and is taken upon the other side of the element by outlet OUT which is connected to alow pressure source. In the illustration of FIG. 2 the liquid issupplied along the direction of movement of the substrate relative tothe final element, though this does not need to be the case. Variousorientations and numbers of in- and out-lets positioned around the finalelement are possible, one example is illustrated in FIG. 3 in which foursets of an inlet with an outlet on either side are provided in a regularpattern around the final element.

SUMMARY

In an immersion lithography, a prime candidate liquid is water as it hasa relatively high refractive index (1.4). However, for optimal use, aneven higher refractive index is desired, typically about 1.6. Toincrease the refractive index of water, alkali sulfate salts may beincluded in the immersion liquid. While this improves the refractiveindex properties of the immersion liquid, the transmissivity of theliquid may be significantly reduced as sulfate salts have a strongoptical absorbance at 193 nm, a common wavelength for lithography.Furthermore, the cost of such an immersion liquid may be high.

Further, the addition of solutes or other particles to, a liquid forimmersion lithography may lead to the possibility of agglomeration ofparticles, or formation of other inhomogeneities in the liquid. Suchinhomogeneity may lead to local scattering of the projection beam andthus to potential faults in the imaged pattern.

In a typical immersion lithography system, the last optic in theprojection system is immersed in the immersion liquid. A material thatmay be used to make this optic is calcium fluoride (CaF₂). However, CaF₂dissolves slowly in water, a liquid which is likely to be used as animmersion liquid. Replacement of such an optic may therefore be requiredmore frequently than desired.

Accordingly, it would be advantageous, for example, to provide alithographic apparatus which, during operation, comprises an immersionliquid having a refractive index higher than that of water and whichaddresses one or more of the problems discussed above.

According to an aspect of the invention, there is provided alithographic apparatus, comprising:

an illumination system configured to condition a beam of radiation;

a support structure configured to hold a patterning device, thepatterning device configured to impart the beam with a pattern in itscross-section;

a substrate table configured to hold a substrate;

a projection system configured to project the patterned beam onto atarget portion of the substrate; and

a liquid supply system configured to fill a space between the projectionsystem and the substrate with a liquid, the liquid comprising an aqueoussolution of one or more alkali metal halides.

The immersion liquid used in the apparatus comprises an aqueous solutionof one or more alkali metal halides. Alkali metal halides (alkalihalides) typically have high refractive indices and inclusion of one ormore alkali halides in the immersion liquid may therefore increase therefractive index of the liquid. By adjusting the nature andconcentration of the alkali halide(s) used, the refractive index of theliquid can be manipulated such that it is at, or close to, the optimalvalue of 1.6.

The alkali halide family have a variety of different optical absorptionpatterns. The alkali halide(s) may therefore be selected so as to have alow optical absorption at the wavelength of the projection beam to beused. Thus, a high transmissivity of the projection beam may bemaintained. Further, alkali halides are highly soluble in water and evendistribution of the salt throughout the solution may therefore easily beachieved. This may help to avoid scattering of the projection beam.

In an embodiment of the invention, the alkali metal halide is an alkalimetal fluoride, in particular sodium or cesium fluoride. The presence offluoride salts in the immersion liquid may reduce the solubility of aCaF₂ optic in the liquid. Thus, the degradation of a CaF₂ componentimmersed in the immersion liquid may be reduced and its lifetimeextended. Sodium and cesium fluoride have an advantage of highsolubility in water and low optical adsorption at crucial wavelengths,such as 193 nm. Thus, the use of these materials may provide hightransmission of the projection beam while also improving the lifetime ofone or more immersed components.

According to a further aspect, there is provided a lithographicapparatus, comprising:

an illumination system configured to condition a beam of radiation;

a support structure configured to hold a patterning device, thepatterning device configured to impart the beam with a pattern in itscross-section;

a substrate table configured to hold a substrate;

a projection system configured to project the patterned beam onto atarget portion of the substrate; and

a liquid supply system configured to fill a space between the projectionsystem and the substrate with a liquid, the liquid supply systemcomprising a mixer configured to mixing a first component with a secondcomponent to form the liquid.

In an embodiment of the invention, the first component is a solvent andthe second component is a concentrate so that the mixing step forms asolution. The mixing of the solution may avoid or reduce agglomerationof particles to ensure a homogenous liquid. In an embodiment, thesolution is continuously mixed in a fluid chamber in part of the liquidsupply system. The mixer in such a chamber or elsewhere may be by use ofa magnet or a mechanical stirrer.

Different solution refractive indices will affect the optical pathlength of the projection beam so the concentration of the solution couldbe used as an additional projection system adjustment parameter. Toachieve this, a measurer configured to measure the concentration of thesolution and a controller configured to control the amount of,concentrate used are provided.

In an embodiment, the amount of the first and/or second components, aswell as optional further components, may be controlled or adjusted inorder to control or adjust one or more physical properties of theliquid. For example, the liquid may comprise two or more differentconcentrates as well as a solvent, the amounts of one or more of theconcentrates being adjustable. This embodiment might involve using ameasuring device to measure a property of the liquid (e.g.concentration, viscosity and/or refractive index) and using a controllerto control the amount(s) of one or more of the components in the liquidin order to control the physical property. The controller may beautomatic or manually operated by the user. The user may tune thephysical property(ies) of the liquid to optimize the behavior of thelithographic apparatus. For example, tuning the viscosity may optimizethe physical and dynamical fluid behavior of the liquid, in turnpotentially reducing bubbling, vibrational coupling, friction and/orheat dissipation. Tuning the refractive index may optimize imaging for aparticular chosen application, or it may minimize radiation loss ordepolarization due to refractive index transitions. The user may controlthe physical property(ies) of the liquid by making any necessaryadjustments to the liquid composition between exposures. The tuningfeatures may be provided to the user through a software program.Additionally or alternatively, the software program may be configured toperform all or some of the tuning automatically without user inventionbased on appropriate algorithms.

The concentrate(s) used may comprise alkali halide, or any otherdissolving mineral salt or dissolvable organic material. As suchconcentrate(s) may be expensive, it may be desirable to reuse theconcentrate(s) so the liquid supply system may comprise a concentrateseparator which separates the concentrate(s) from the solvent. Theconcentrate(s) could then be reused and the solvent, together with anyimpurities, removed.

According to a further aspect of the invention, there is provided adevice manufacturing method, comprising:

providing a liquid comprising an aqueous solution of an alkali metalhalide to a space between a projection system and a substrate; and

projecting a patterned beam of radiation, using the projection system,through the liquid onto a target portion of the substrate.

According to a further aspect of the invention, there is provided adevice manufacturing method, comprising:

continuously mixing a first component and a second component to form aliquid;

providing the liquid to a space between a projection system and asubstrate; and

projecting a patterned beam of radiation, using the projection system,through the liquid onto a target portion of the substrate.

The first and second components are, for example, a solvent and aconcentrate. Further, the method may comprise controlling a physicalproperty of the liquid by controlling an amount of the first component,the second component, or both used to form the liquid.

According to a further aspect of the invention there is provided anaqueous solution of one or more alkali metal halides, the solutionhaving one or more of the following properties

-   (a) a content of organic compounds of 5 ppb or less;-   (b) a particle content of no more than 2 particles having a    dimension of 50 nm or greater per ml of the solution;-   (c) a dissolved oxygen concentration of 15 ppb or less; and-   (d) a silica content of 500 ppt or less.

According to a further aspect, there is provided the use of one or morealkali metal halides as an agent to increase the refractive index of aliquid which is water or an aqueous solution, wherein the liquid fills aspace between a projection system and a substrate in a lithographicapparatus when in operation.

According to a yet further aspect of the invention there is provided theuse of an alkali metal fluoride as an agent to reduce degradation of aCaF₂ part in a liquid, wherein the liquid fills a space between aprojection system and a substrate in a lithographic apparatus when inoperation.

Although specific reference may be made in this text to the use oflithographic apparatus in the manufacture of ICs, it should beunderstood that the lithographic apparatus described herein may haveother applications, such as the manufacture of integrated opticalsystems, guidance and detection patterns for magnetic domain memories,liquid-crystal displays (LCDs), thin-film magnetic heads, etc. Theskilled artisan will appreciate that, in the context of such alternativeapplications, any use of the terms “wafer” or “die” herein may beconsidered as synonymous with the more general terms “substrate” or“target portion”, respectively. The substrate referred to herein may beprocessed, before or after exposure, in for example a track (a tool thattypically applies a layer of resist to a substrate and develops theexposed resist) or a metrology or inspection tool. Where applicable, thedisclosure herein may be applied to such and other substrate processingtools. Further, the substrate may be processed more than once, forexample in order to create a multi-layer IC, so that the term substrateused herein may also refer to a substrate that already contains multipleprocessed layers.

The terms “radiation” and “beam” used herein encompass all types ofelectromagnetic radiation, including ultraviolet (UV) radiation (e.g.having a wavelength of 365, 248, 193, 157 or 126 nm).

The term “patterning device” used, herein should be broadly interpretedas referring to any device that can be used to impart a projection beamwith a pattern in its cross-section such as to create a pattern in atarget portion of the substrate. It should be noted that the patternimparted to the projection beam may not exactly correspond to thedesired pattern in the target portion of the substrate. Generally, thepattern imparted to the projection beam will correspond to a particularfunctional layer in a device being created in the target portion, suchas an integrated circuit.

A patterning device may be transmissive or reflective. Examples ofpatterning devices include masks, programmable mirror arrays, andprogrammable LCD panels. Masks are well known in lithography, andinclude mask types such as binary, alternating phase-shift, andattenuated phase-shift, as well as various hybrid mask types. An exampleof a programmable mirror array employs a matrix arrangement of smallmirrors, each of which can be individually tilted so as to reflect anincoming radiation beam in different directions; in this manner, thereflected beam is patterned. In each example of a patterning device, thesupport structure may be a frame or table, for example, which may befixed or movable as required and which may ensure that the patterningdevice is at a desired position, for example with respect to theprojection system. Any use of the terms “reticle” or “mask” herein maybe considered synonymous with the more general term “patterning device”.

The term “projection system” used herein should be broadly interpretedas encompassing various types of projection system, including refractiveoptical systems, reflective optical systems, and catadioptric opticalsystems, as appropriate for example for the exposure radiation beingused, or for other factors such as the use of an immersion fluid or theuse of a vacuum. Any use of the term “projection lens” herein may beconsidered as synonymous with the more general term “projection system”.

The illumination system may also encompass various types of opticalcomponents, including refractive, reflective, and catadioptric opticalcomponents for directing, shaping, or controlling the projection beam ofradiation.

The lithographic apparatus may be of a type having two (dual stage) ormore substrate tables (and/or two or more mask tables). In such“multiple stage” machines the additional tables may be used in parallel,or preparatory steps may be carried out, on one or more tables while oneor more other tables are being used for exposure.

BRIEF. DESCRIPTION OF THE DRAWINGS

Embodiments of the invention will now be described, by way of exampleonly, with reference to the accompanying schematic drawings in whichcorresponding reference symbols indicate corresponding parts, and inwhich:

FIG. 1 depicts a lithographic apparatus according to an embodiment ofthe invention;

FIG. 2 depicts an example of a liquid supply system;

FIG. 3 depicts an example of the orientations of inlets and outlets ofthe liquid supply system of FIG. 2;

FIG. 4 depicts a liquid supply system according to an alternativeembodiment of the invention;

FIG. 5 depicts a liquid supply system according to an alternativeembodiment of the invention; and

FIG. 6 depicts a liquid supply system according to a further alternativeembodiment of the invention.

DETAILED DESCRIPTION

FIG. 1 schematically depicts a lithographic apparatus according to aparticular embodiment of the invention. The apparatus comprises:

-   -   an illumination system (illuminator) IL configured to condition        a projection beam PB of radiation (e.g. UV radiation).    -   a first support structure (e.g. a mask table) MT configured to        hold a patterning device (e.g. a mask) MA and connected to first        positioner PM configured to accurately position the patterning        device with respect to item PL;    -   a substrate table (e.g. a wafer table) WT configured to hold a        substrate (e.g. a resist-coated wafer) W and connected to second        positioner PW configured to accurately position the substrate        with respect to item PL; and    -   a projection system (e.g. a refractive projection lens) PL        configured to image a pattern imparted to the projection beam PB        by patterning device MA onto a target portion C (e.g. comprising        one or more dies) of the substrate W.

As here depicted, the apparatus is of a transmissive type (e.g.employing a transmissive mask). Alternatively, the apparatus may be of areflective type (e.g. employing a programmable mirror array of a type asreferred to above).

The illuminator IL receives a beam of radiation from a radiation sourceSO. The source and the lithographic apparatus may be separate entities,for example when the source is an excimer laser. In such cases, thesource is not considered to form part of the lithographic apparatus andthe radiation beam is passed from the source SO to the illuminator ILwith the aid of a beam delivery system BD comprising for examplesuitable directing mirrors and/or a beam expander. In other cases thesource may be integral part of the apparatus, for example when thesource is a mercury lamp. The source SO and the illuminator IL, togetherwith the beam delivery system BD if required, may be referred to as aradiation system.

The illuminator IL may comprise adjusting means AM for adjusting theangular intensity distribution of the beam. Generally, at least theouter and/or inner radial extent (commonly referred to as σ-outer andσ-inner, respectively) of the intensity distribution in a pupil plane ofthe illuminator can be adjusted. In addition, the illuminator ILgenerally comprises various other components, such as an integrator INand a condenser CO. The illuminator provides a conditioned beam ofradiation, referred to as the projection beam PB, having a desireduniformity and intensity distribution in its cross-section.

The projection beam PB is incident on the mask MA, which is held on themask table MT. Having traversed the mask MA, the projection beam PBpasses through the projection system PL supported by a frame RF, whichfocuses the beam onto a target portion C of the substrate W. With theaid of the second positioner PW and position sensor IF (e.g. aninterferometric device), the substrate table WT can be moved accurately,e.g. so as to position different target portions C in the path of thebeam PB. Similarly, the first positioner PM and another position sensor(which is not explicitly depicted in FIG. 1) can be used to accuratelyposition the mask MA with respect to the path of the beam PB, e.g. aftermechanical retrieval from a mask library, or during a scan. In general,movement of the object tables MT and WT will be realized with the aid ofa long-stroke module (coarse positioning) and a short-stroke module(fine positioning), which form part of the positioners PM and PW.However, in the case of a stepper (as opposed to a scanner) the masktable MT may be connected to a short stroke actuator only, or may befixed. Mask MA and substrate W may be aligned using mask alignment marksM1, M2 and substrate alignment marks P1, P2. Immersion lithography maybe realized by an immersion hood IH, which provides or at least in partconfines an immersion liquid to at least a portion of the substrate W.

The depicted apparatus can be used in the following preferred modes:

-   1. In step mode, the mask table MT and the substrate table WT are    kept essentially stationary, while an entire pattern imparted to the    projection beam is projected onto a target portion C in one go (i.e.    a single static exposure). The substrate table WT is then shifted in    the X and/or Y direction so that a different target portion C can be    exposed. In step mode, the maximum size of the exposure field limits    the size of the target portion C imaged in a single static exposure.-   2. In scan mode, the mask table MT and the substrate table WT are    scanned synchronously while a pattern imparted to the projection    beam is projected onto a target portion C (i.e. a single dynamic    exposure). The velocity and direction of the substrate table WT    relative to the mask table MT is determined by the    (de-)magnification and image reversal characteristics of the    projection system PL. In scan mode, the maximum size of the exposure    field limits the width (in the non-scanning direction) of the target    portion, in a single dynamic exposure, whereas the length of the    scanning motion determines the height (in the scanning direction) of    the target portion.-   3. In another mode, the mask table MT is kept essentially stationary    holding a programmable patterning device, and the substrate table WT    is moved or scanned while a pattern imparted to the projection beam    is projected onto a target portion C. In this mode, generally a    pulsed radiation source is employed and the programmable patterning    device is updated as required after each movement of the substrate    table WT or in between successive radiation pulses during a scan.    This mode of operation can be readily applied to maskless    lithography that utilizes a programmable patterning device, such as    a programmable mirror array of a type as referred to above.

Combinations and/or variations on the above described modes of use orentirely different modes of use may also be employed.

Another immersion lithography solution with a localized liquid supplysystem solution which has been proposed is to provide the liquid supplysystem with a seal member which extends along at least a part of aboundary of the space between the final element of the projection systemand the substrate table. The seal member is substantially stationaryrelative to the projection system in the XY plane though there may besome relative movement in the Z direction (in the direction of theoptical axis). A seal is formed between the seal member and the surfaceof the substrate. In an embodiment, the seal is a contactless seal suchas a gas seal. Such a system with a gas seal is disclosed in U.S. patentapplication Ser. No. 10/705,783, hereby incorporated in its entirety byreference, and shown in FIG. 5.

FIG. 5 shows a liquid reservoir 10 between the projection system and thesubstrate stage according to an embodiment of the invention. The liquidreservoir 10 is filled with a liquid 11 having a relatively highrefractive index, provided via inlet/outlet ducts 13. A liquid sourcecontaining the liquid is typically provided which is used to fill thereservoir via inlet ducts 13. The liquid has the effect that theradiation of the projection beam has a shorter wavelength in the liquidthan in air or a vacuum, allowing smaller features to be resolved. It iswell known that the resolution limit of a projection system isdetermined, inter alia, by the wavelength of the projection beam and thenumerical aperture of the system. The presence of the liquid may also beregarded as increasing the effective numerical aperture. Furthermore, atfixed numerical aperture, the liquid is effective to increase the depthof field.

A liquid supply system for use in an embodiment of the present inventionis also depicted in FIG. 5. The reservoir 10 forms a contactless seal tothe substrate around the image field of the projection system so thatliquid is confined to fill a space between the substrate surface and thefinal element of the projection system. The reservoir is formed by aseal member 12 positioned below and surrounding the final element of theprojection system PL. Liquid is brought into the space below theprojection system and within the seal member 12. The seal member 12extends a little above the final element of the projection system andthe liquid level rises above the final element so that a buffer ofliquid is provided. The seal member 12 has an inner periphery that atthe upper end closely conforms to the step of the projection system orthe final element thereof and may, e.g., be round. At the bottom, theinner periphery closely conforms to the shape of the image field, e.g.,rectangular though this need not be the case.

The liquid is confined in the reservoir by a gas seal 16 between thebottom of the seal member 12 and the surface of the substrate W. The gasseal is formed by gas, e.g. air, synthetic air, N₂ or an inert gas,provided under pressure via inlet 15 to the gap between seal member 12and substrate and extracted via outlet 14. The overpressure on the gasinlet 15, vacuum level on the outlet 14 and geometry of the gap arearranged so that there is a high-velocity gas flow inwards that confinesthe liquid.

The gas outlet system can also be used to remove the liquid from thesystem, thus acting as a liquid removal system. This is achieved byreducing the gas inlet pressure and allowing the liquid to be sucked outby the vacuum system, which can easily be arranged to handle the liquid,as well as the gas used to form the seal. In this way, the gas outletsystem can be used to remove excess liquid from the substrate surfaceafter exposure. The substrate W is taken out of the system and, as thesubstrate passes gas outlet 14, liquid is removed by the vacuum system.

FIGS. 2, 3 and 4 depict the liquid supply system of alternativeembodiments of the invention. The details of these systems have beendiscussed further herein.

An immersion lithography apparatus typically comprises a liquid sourcecontaining the immersion liquid or at least one component (oringredient) of the immersion liquid. For example, the liquid source maycontain a concentrated solution of alkali halide (e.g. a concentrationof greater than 2M, for example greater than 5M) or it may containalkali halide in solid form. The concentrated solution or solid may bediluted or dissolved as described below before being introduced intoreservoir 10. An immersion liquid means the liquid through which thepatterned beam is projected onto the substrate and may be suppliedbetween the projection system and the substrate or the projection systemand the patterning means. The immersion liquid need not fully immersethe substrate or mask. For example, the immersion liquid may be providedto cover only a portion of a surface of the substrate, mask and/orprojection system.

In an embodiment of the present invention, the immersion liquid is anaqueous solution comprising one or more alkali halides. The alkalihalide(s) to be used in the solution are selected based, for example, ontheir refractive index, absorption properties and solubility in water.In particular, the refractive index of the alkali halide(s) should begreater than that of water. The approximate refractive indices of thealkali halides are set out in Table 1 below:

TABLE 1 F Cl Br I Li ~1.4 >1.7 Na 1.35 1.63 1.84 2.1 K ~1.4 1.56 1.732.03 Rb 1.59 1.9 Cs 1.88 2.1

In an embodiment, the immersion liquid has a refractive index of greaterthan 1.4, greater than 1.5 or greater than about 1.6. The nature andconcentration of the alkali halide(s) can be altered in order to achievethe desired refractive index. Typical concentrations of the alkalihalide are in the range of 0.01 to 2M, for example from 0.1 to 1M.

The alkali halide to be used is typically selected so that the immersionliquid has a low optical absorption at the wavelength of the projectionbeam. Typically, the alkali halide is one which has a low opticalabsorption at about 193 nm and/or 248 nm. However, where a differentwavelength is used for the projection beam, the choice of alkali halidecan be altered accordingly. Approximate room temperature absorption edgevalues (in nm) for the alkali halides are given in Table 2 below:

TABLE 2 F Cl Br I Li 105 168 194 248 Na 129 183 203 248 K 138 180 200232 Rb 144 185 207 243 Cs 151 188 203 241

It is advantageous to use an alkali halide that has a high solubility inwater. Approximate values for the solubility of the alkali halides incold water are given in Table 3 below (measured in g/100 cc):

TABLE 3 F Cl Br I Li 0.27 63.7 145 165 Na 4.22 35.7 116 184 K 92 34 53127 Rb 130 77 98 152 Cs 367 162 124 44

In an embodiment, in order to reduce or minimize the absorption of theimmersion liquid at 193 nm and 248 nm, and to provide refractive indicesin the desired range, selected alkali halide(s) include alkali metalchlorides, bromides and iodides, in particular the chlorides andiodides. Further, selected alkali halides include sodium, potassium,rubidium and cesium halides.

In an embodiment, the alkali halide used is a fluoride. This embodimenthas the advantage that the lifetime of CaF₂ components immersed in theimmersion liquid is increased by reducing the solubility of CaF₂ in theimmersion liquid. In an embodiment, alkali metal fluorides NaF and CsFmay be used NaF has a particularly low adsorption at 193 nm and istherefore appropriate for use in 193 nm tools. CsF, however, issignificantly more soluble in water and is thought to have a very highrefractive index at 193 nm. Either material can therefore advantageouslybe employed.

By way of example, the following compares the solubility of CaF₂ in purewater and in a NaF solution.

The solubility constant Ksp for CaF₂ is 3.9e-11 M³, whereKsp=[Ca²⁺]*[F⁻]². Therefore, in pure water:Ksp=[Ca²⁺]*[F⁻]²=[Ca²⁺]*[2*Ca²⁺]²=4*[Ca²⁺]³=3.9e-11 M³[Ca²⁺]=2.1e-4 Mi.e. at equilibrium, 2.1e-4 moles of CaF₂ will dissolve in a liter ofwater.

Similarly in a 0.01 M NaF solution:Ksp=[Ca²⁺]*[F⁻]²=[Ca²⁺]*[2*Ca²⁺+0.01 M]²=3.9e-11 M³Since [Ca²⁺] will be much smaller than 0.01 M,[2*Ca²⁺+0.01 M]˜[0.01 M]andKsp=[Ca²⁺]*[0.01 M]²=3.9e-11 M³and[Ca²⁺]=3.9e-7 M

Thus, the solubility of CaF₂ is reduced by a factor of 1000 in 0.01M NaFcompared to pure water. This demonstrates that a significant reductionin degradation of CaF₂ components will occur in 0.01M NaF compared topure water.

In an embodiment, immersion liquids for use in immersion lithography areaqueous solutions of one or more alkali metal halides as describedabove, wherein the aqueous solution has one or more of the followingproperties:

-   (a) a content of organic compounds of 5 ppb or less or 1 ppb or    less;-   (b) a particle content of no more than 2 particles having a    dimension of 50 nm or greater per ml of immersion liquid, or no more    than 0.5 particles having a dimension of 50 nm or greater per ml of    immersion liquid;-   (c) a dissolved oxygen concentration of 15 ppb or less or 5 ppb or    less; and-   (d) a silica content of 500 ppt or less or 100 ppt or less.    In an embodiment, the aqueous solution has two or more or three or    more, of the above properties. In an embodiment, the aqueous    solution has a pH of from 5 to 8 or from 6 to 8. The aqueous    solution in one embodiment has an alkali metal salt concentration of    0.01 to 2M. The aqueous solution may alternatively be a concentrated    solution, adapted to be diluted prior to use as the immersion    liquid. In this case, the aqueous solution typically has an alkali    metal salt concentration of at least 2M, for example at least 5M.

The aqueous solution may be prepared by using the apparatus depicted inFIG. 6. As can be seen, a concentrate feeder 21 stores a supply of theconcentrate to be used. If appropriate, two or more concentrate feeders21, 31 may be present to store supplies of two or more concentrates tobe used. As described above one or more of the concentrates is, in anembodiment, an alkali halide but the concentrate(s) may be anydissolvable salt, dissolvable organic material or nano-particles whichchange the refractive index of the resulting solution. Theconcentrate(s) may alternatively be highly concentrated solution(s)comprising the alkali halide dissolvable salt, dissolvable organicmaterial or nano-particles. In this case, the concentration of alkalihalide dissolvable salt, dissolvable organic material or nano-particlesin the concentrate is typically at least 2M. The concentrate fromconcentrate feeder 21 is fed to a fluid manifold 20 through inlet 22,while optional second concentrate from concentrate feeder 31 is fed tothe fluid manifold through inlet 32. A solvent source 23 simultaneouslysupplies the fluid manifold 20 with a solvent through a tube 24. Thesolvent and the or each concentrate are mixed together in the fluidmanifold to form a solution having the desired properties, e.g.viscosity and/or refractive index. The solution in the fluid manifold iscontinuously mixed using a mixer 28 to form a completely homogenousmixture. The mixer may be, for example, a magnet based mixing system inwhich a magnet is present in the fluid manifold and energization of anelectromagnet causes the magnet to move around inside the fluidmanifold. In an embodiment, the magnet should have a density similar tothat of the solution to ensure that it moves around the whole of thefluid manifold 20, not just the top or bottom, to ensure that the wholemixture is equally mixed. Alternatively, a mechanical stirrer could beused. In an embodiment, the method for mixing the solution should avoidintroducing gas (e.g., air) bubbles into the mixture as these could betransferred to the immersion liquid under the projection system causingerrors in the exposure of substrate. By continuously mixing thesolution, particle-particle interactions are not allowed to dominate andagglomeration of particles is avoided. The homogenous mixture is fedinto a space 11 between the projection system and the substrate and thesolution is removed from the space by outlet 18. Fresh solution is thuscontinuously supplied and removed from the space 11 and a build up ofparticles does not occur. The solution may be fed from outlet 18 toconcentrate separator 25 which separates the or each concentrate fromthe solvent. The concentrate(s) can then be reused by feeding throughtube 26 (and optionally tube 34) back to concentrate feeder 21 (andoptionally concentrate feeder 31). The solvent, together with anyimpurities, can be removed through tube 27.

The amount of concentrate fed into the fluid manifold 20 from feeder 21may be controlled by controller 30. Similarly, the amount of concentratefed from feeder 31 may be controlled by controller 33. The amount of theor each concentrate introduced to fluid manifold 20 may be adjusted inorder to alter the properties of the solution, e.g. viscosity and/orrefractive index. Measuring device 29 may be used to determine one ormore physical properties of the solution in fluid manifold 20, e.g. theconcentration of one or more concentrates, refractive index and/orviscosity. The results of this measurement may be fed to controller 30and optionally controller 33 to give continuous feedback regarding theproperties of the solution. The concentration of the solution in thepath of the projection beam affects the optical path length so thestrength of the concentration could also be used as an additionalprojection system adjustment parameter. The viscosity and/or refractiveindex of the solution could also be adjusted similarly.

A further immersion lithography solution with a localized liquid supplysystem is shown in FIG. 4. Liquid is supplied by two groove inlets IN oneither side of the projection system PL and is removed by a plurality ofdiscrete outlets OUT arranged radially outwardly of the inlets IN. Theinlets IN and OUT can be arranged in a plate with a hole in its centerand through which the projection beam is projected. Liquid is suppliedby one groove inlet IN on one side of the projection system PL andremoved by a plurality of discrete outlets OUT on the other side of theprojection system PL, causing a flow of a thin film of liquid betweenthe projection system PL and the substrate W. The choice of whichcombination of inlet IN and outlets OUT to use can depend on thedirection of movement of the substrate W (the other combination of inletIN and outlets OUT being inactive).

In European Patent Application No. 03257072.3, the idea of a twin ordual stage immersion lithography apparatus is disclosed. Such anapparatus is provided with two tables for supporting a substrate.Leveling measurements are carried out with a table at a first position,without immersion liquid, and exposure is carried out with a table at asecond position, where immersion liquid is present. Alternatively, theapparatus has only one table.

Embodiments of the present invention may be applied to any immersionlithography apparatus, in particular, but not exclusively, those typesmentioned above.

In an embodiment, there is provided a lithographic apparatus,comprising: an illumination system configured to condition a beam ofradiation; a support structure configured to hold a patterning device,the patterning device configured to impart the beam with a pattern inits cross-section; a substrate table configured to hold a substrate; aprojection system configured to project the patterned beam onto a targetportion of the substrate; and a liquid supply system configured to filla space between the projection system and the substrate with a liquid,the liquid comprising an aqueous solution of one or more alkali metalhalides.

In an embodiment, the liquid supply system comprises a liquid sourcecontaining the liquid or a component of the liquid. In an embodiment,the alkali metal halide is an alkali metal fluoride. In an embodiment,the alkali metal fluoride is NaF or CsF. In an embodiment, the alkalimetal halide is an alkali metal chloride or bromide. In an embodiment,the alkali metal halide is a sodium, potassium, rubidium or cesiumhalide. In an embodiment, the liquid has a refractive index of 1.5 ormore.

In an embodiment, there is provided use of one or more alkali metalhalides as an, agent to increase the refractive index of a liquid whichis water or an aqueous solution, wherein the liquid fills a spacebetween a projection system and a substrate in a lithographic apparatuswhen in operation.

In an embodiment, there is provided use of an alkali metal fluoride asan agent to reduce degradation of, a CaF₂ part in a liquid, wherein theliquid fills a space between a projection system and a substrate in alithographic apparatus when in operation.

In an embodiment, there is provided a device manufacturing method,comprising: providing a liquid comprising an aqueous solution of analkali metal halide to a space between a projection system and asubstrate; and projecting a patterned beam of radiation, using theprojection system, through the liquid onto a target portion of thesubstrate.

In an embodiment, the alkali metal halide is an alkali metal fluoride.In an embodiment, the alkali metal halide is an alkali metal chloride orbromide. In an embodiment, the alkali metal halide is a sodium,potassium, rubidium or cesium halide. In an embodiment, the liquid has arefractive index of 1.5 or more.

In an embodiment, there is provided an aqueous solution of one or morealkali metal halides, the solution having one or more of the followingproperties: (a) a content of organic compounds of 5 ppb or less; (b) aparticle content of no more than 2 particles having a dimension of 50 nmor greater per ml of the solution; (c) a dissolved oxygen concentrationof 15 ppb or less; and (d) a silica content of 500 ppt or less.

In an embodiment, the one or more alkali metal halides is NaF or CsF. Inan embodiment, the content of organic compounds is 1 ppb or less. In anembodiment, the particle content is no more than 0.5 particles having adimension of 50 nm or greater per ml of the solution. In an embodiment,the dissolved oxygen concentration is 5 ppb or less. In an embodiment,the silica content is 100 ppt or less.

In an embodiment, there is provided a lithographic apparatus,comprising: an illumination system configured to condition a beam ofradiation; a support structure configured to hold a patterning device,the patterning device configured to impart the beam with a pattern inits cross-section; a substrate table configured to hold a substrate; aprojection system configured to project the patterned beam onto a targetportion of the substrate; and a liquid supply system configured to filla space between the projection system and the substrate with a liquid,the liquid supply system comprising a mixer configured to mixing a firstcomponent with a second component to form the liquid.

In an embodiment, the liquid supply system comprises a controllerconfigured to control the amount of the first component, the secondcomponent, or both. In an embodiment, the liquid supply system comprisesa measuring device configured to measure one or more properties of theliquid. In an embodiment, the first component is a solvent and thesecond component is a concentrate. In an embodiment, the concentratecomprises an alkali metal halide. In an embodiment, the apparatusfurther comprises a separator configured to separate the concentratefrom the solvent. In an embodiment, the liquid supply system comprises afluid chamber in which the liquid is continuously mixed. In anembodiment, the mixer comprises a magnet. In an embodiment, the mixer isconfigured to mix a solvent, a first concentrate and a secondconcentrate. In an embodiment, the first concentrate, the secondconcentrate, or both comprises an alkali metal halide. In an embodiment,the apparatus further comprises a separator configured to separate thefirst concentrate, the second concentrate, or both from the solvent.

In an embodiment, there is provided a device manufacturing method,comprising: continuously mixing a first component and a second componentto form a liquid; providing the liquid to a space between a projectionsystem and a substrate; and projecting a patterned beam of radiation,using the projection system, through the liquid onto a target portion ofthe substrate.

In an embodiment, the first component is a solvent and the secondcomponent is a concentrate. In an embodiment, the method furthercomprises controlling a physical property of the liquid by controllingan amount of the first component, the second component, or both used toform the liquid.

While specific embodiments of the invention have been described above,it will be appreciated that the invention may be practiced otherwisethan as described. The description is not intended to limit theinvention.

1. A device manufacturing method, comprising: providing a lithographicapparatus, comprising a projection system and a liquid supply system tosupply a liquid to a space between the projection system and asubstrate, the liquid supply system including a mixer configured to mixat least a first component with a second component to form the liquidbefore supply to the space, a controller configured to control aphysical property of the liquid by controlling the amount of the firstand/or second component used to form the liquid, and a measuring deviceconfigured to measure a property of the liquid and to make feedbackavailable to the controller; mixing using the mixer the first componentand the second component to form the liquid; measuring a property of theliquid using the measuring device and making the feedback available tothe controller; based on the feedback, controlling with the controllerthe physical property of the liquid by controlling the amount of thefirst and/or second component used to form the liquid; supplying theliquid to the space between the projection system and the substrate; andprojecting a patterned beam of radiation, using the projection system,through the liquid onto a target portion of the substrate.
 2. The methodaccording to claim 1, wherein the second component is a solid or liquid.3. The method according to claim 1, wherein the first component is asolvent and the second component is a concentrate.
 4. The methodaccording to claim 1, wherein measuring the property comprises measuringthe physical property of the liquid.
 5. The method according to claim 1,further comprising continuously mixing the liquid in a chamber duringsupply of the liquid to the space.
 6. The method according to claim 1,wherein the mixing comprises mixing a solvent, the first component andthe second component.
 7. The method according to claim 1, wherein thephysical property comprises one or more selected from: viscosity,refractive index or concentration of the liquid.
 8. A lithographicapparatus, comprising: a table; a projection system to project apatterned beam onto a target portion of a substrate; a fluid supplysystem to supply a fluid comprising liquid to a space between theprojection system and the table; a manifold to mix a first liquidcomponent with a second component to form the fluid before supply to thespace; a controller to control a physical property of the fluid bycontrolling the amount of the first and/or second component used to formthe fluid; and a measuring device to measure a property of the fluid andto make feedback available to the controller, wherein the controller isconfigured to control the physical property of the fluid based on thefeedback.
 9. The apparatus according to claim 8, wherein the physicalproperty comprises one or more selected from: viscosity, refractiveindex or concentration of the fluid.
 10. The apparatus according toclaim 8, wherein the measuring device is configured to measure thephysical property of the fluid.
 11. The apparatus according to claim 8,wherein the first component is a solvent and the second component is aconcentrate.
 12. The apparatus according to claim 8, comprising achamber in which the fluid is continuously mixed during supply to thespace.
 13. The apparatus according to claim 8, wherein the projectionsystem is configured to project a beam of radiation through the fluid.14. A device manufacturing method, comprising: providing a lithographicapparatus, comprising a projection system and a fluid supply system tosupply a fluid comprising a liquid to a space between the projectionsystem and a table, the lithographic apparatus including a manifold tomix at least a first liquid component with a second component to formthe fluid before supply to the space, a controller configured to controla physical property of the fluid by controlling the amount of the firstand/or second component used to form the fluid, and a measuring deviceconfigured to measure a property of the fluid and to make feedbackavailable to the controller; mixing in the manifold the first componentand the second component to form the fluid; measuring a property of thefluid using the measuring device and making the feedback available tothe controller; based on the feedback, controlling with the controllerthe physical property of the fluid by controlling the amount of thefirst and/or second component used to form the fluid; and supplying thefluid to the space between the projection system and the table.
 15. Themethod according to claim 14, wherein the physical property comprisesone or more selected from: viscosity, refractive index or concentrationof the fluid.
 16. The method according to claim 14, wherein measuringthe property comprises measuring the physical property of the fluid. 17.The method according to claim 14, wherein the first component is asolvent and the second component is a concentrate.
 18. The methodaccording to claim 14, further comprising continuously mixing the fluidin a chamber during supply of the fluid to the space.
 19. The methodaccording to claim 14, wherein the mixing comprises mixing a solvent,the first component and the second component.
 20. The method accordingto claim 14, further comprising projecting a beam of radiation, usingthe projection system, through the fluid.